| title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
|---|---|---|---|
| Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applications | 978-1-118-06277-7 (1-118-06277-9) | 2013 | Tommi Kääriäinen · David Cameron · Arthur Sherman |
| Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applicatons | 978-1-118-74740-7 (1-118-74740-2) | 2013 | Tommi Kääriäinen · David Cameron · Arthur Sherman |