| title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
|---|---|---|---|
| Optical Microlithography XI: 25-27 February, 1998, Santa Clara, California | 978-0-8194-2779-3 (0-8194-2779-9) | 1998 | Society of Photo-Optical Instrumentation Engineers |
| Optical Microlithography XII: Proceedings of Spie 17-19 March 1999 Santa Clara, California | 978-0-8194-3153-0 (0-8194-3153-2) | 1999 | " |