| title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
|---|---|---|---|
| Microlithography: Science and Technology | 978-0-8247-9953-3 (0-8247-9953-4) | 1998 | Bruce W. Smith · James R. Sheats |
| Microlithography: Science and Technology, Second Edition | 978-0-8247-9024-0 (0-8247-9024-3) | 2007 | Bruce W. Smith |
| Microlithography: Science and Technology, Third Edition | 978-1-4398-7675-6 (1-4398-7675-4) | 2019 | " |