by: Bruce W. Smith · Kazuaki Suzuki · James R. Sheats
Hardcover
details (Italy).
(see also: Copertina rigida)
details (Spain - España).
(see also: Tapa dura)
ISBN: 978-0-8247-9953-3
ISBN-10: 0-8247-9953-4
CRC Press · 1998
|
|
by: Bruce W. Smith · Kazuaki Suzuki · James R. SheatsHardcover
details (Italy). details (Spain - España).
ISBN: 978-0-8247-9953-3 ISBN-10: 0-8247-9953-4 CRC Press · 1998 |
| See also: | ||
| 2019 | Hardcover | Microlithography: Science and Technology, Third Edition |
| 2007 | Hardcover | Microlithography: Science and Technology, Second Edition (Opitcal Science and Engineering) |