| title | ISBN-13 | year of publica- tion | other author(s) |
|---|---|---|---|
| Handbook for Cleaning for Semiconductor Manufacturing: Fundamentals and Applications | 978-0-470-62595-8 | 2011 | Richard F. Reidy |
| Handbook of Silicon Wafer Cleaning Technology | 978-0-8155-1554-8 | 2007 | |
| Texturing, Cleaning, and Etching | 978-1-119-24200-0 | 2020 | |
| Texturing, Cleaning, and Etching | 978-1-119-24201-7 | 2018 | |
A. R. · k.A. · K. R. · K. Reinhardt · Karen Reinhardt