| title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
|---|---|---|---|
| Handbook of Cleaning in Semiconductor Manufacturing: Fundamental and Applications | 978-0-470-62595-8 (0-470-62595-3) | 2011 | |
| Handbook of Silicon Wafer Cleaning Technology | 978-0-323-51084-4 (0-323-51084-1) | 2018 | Werner Kern |
| Handbook of Silicon Wafer Cleaning Technology | 978-0-8155-1554-8 (0-8155-1554-5) | 2008 | " |
K. R. · K. Reinhardt · Karen A. Reinhardt · Karen S. Reinhardt · Ms. Karen S. Reinhardt
Mosby · Wiley · William Andrew