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Jürgen Engemann
J. E.
title
ISBN-13
(ISBN-10)
year of publica-
tion
other author(s)
Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Techniques, Fundamentals and Devices
978-O-7923-2265-8
(O-7923-2265-7)
1993
O. Auciello
Jürgen Engert