title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
---|---|---|---|
Microelectromechanical Systems-Materials and Devices III: Volume 1222 | 978-1-1O7-4O8O4-3 (1-1O7-4O8O4-O) | 2014 | Norman F. Sheppard Jr · Keviin T. Turner · Srikar Vengallatore |
J.B. · Jerzy Bogdanienko · Jerzy Bogdanowski · Jorge Bustamante