title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) | |
---|---|---|---|---|
C, H, N and O in Si and Characterization and Simulation of Materials and Processes | 978-0-444-82413-4 (0-444-82413-8) | 1996 | A. Borghesi · U. M. Gosele · A. M. Gue · M. Djafari-Rouhani | |
Gettering and Defect Engineering in Semiconductor Technology: GADEST '97 | 978-3-908450-27-6 (3-908450-27-6) | 1997 | C Claeys · H Richter · M Kittler |