J. Vanhellemont

J.V.

Elsevier Science · Trans Tech

title ISBN-13
(ISBN-10)
year of publica-
tion
other author(s)
C, H, N and O in Si and Characterization and Simulation of Materials and Processes 978-0-444-82413-4
(0-444-82413-8)
1996A. Borghesi · U. M. Gosele · A. M. Gue · M. Djafari-Rouhani
Gettering and Defect Engineering in Semiconductor Technology: GADEST '97
978-3-908450-27-6
(3-908450-27-6)
1997C Claeys · H Richter · M Kittler

 

J. Vanheste