| title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
|---|---|---|---|
| Handbook of Silicon Based MEMS Materials and Technologies | 978-O-12-817786-O (O-12-817786-1) | 2020 | Markku Tilli · Mervi Paulasto-Krockel · Matthias Petzold · Teruaki Motooka · Veikko Lindroos |