| title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
|---|---|---|---|
| Materials Science of Microelectromechanical Systems Devices Iii: Volume 657 | 978-1-107-41229-3 (1-107-41229-3) | 2014 | |
| Materials Science of Microelectromechanical Systems Devices IV: Volume 687 | 978-1-107-41212-5 (1-107-41212-9) | 2014 | Arturo A. Ayón · Thomas E. Buchheit · S. Mark Spearing |
H. Kahn · Harald Kam · Harald Kania · Harald Kiehn · Harald Kinne · Harald Köhne · Harald Kühn · Harald Kuhn · Harold A. Kahn · Harold Kuhn