Materials Science of Microelectromechanical Systems (MEMS) Devices IV: Volume 687 (MRS Proceedings)

Proceedings

by: Arturo A. Ayón · Thomas E. Buchheit · Harold Kahn · S. Mark Spearing

Paperback

ISBN: 978-1-107-41212-5

ISBN-10: 1-107-41212-9

Cambridge University Press · 2014