| title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
|---|---|---|---|
| Micromachining and Microfabrication Process Technology XI | 978-0-8194-6151-3 (0-8194-6151-2) | 2006 | Mary-ann Maher · Jung-Chih Chiao |
| Micromachining Technology for Micro-optics and Nano-optics V + Microfabrication Process Technology XII | 978-0-8194-6575-7 (0-8194-6575-5) | 2007 | Mary-ann Maher · Jung-Chih Chiao · Thomas J. Suleski · Eric G. Johnson |