Fred K. Forster

titleISBN-13
(ISBN-10)
year of publica-
tion
other author(s)
Micro-Electro-Mechanical Systems (Mems) 1998: Micro-Manuacturing Processes in Mems and Other Advanced Systems978-O-7918-1596-O
(O-7918-1596-X)
1998Xiang Zhang · Narayan R. Aluru · Liwei Lin

F. F. · F Forster · F K · Fred K. · K. Forster

Fred K. Foulkes