title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
---|---|---|---|
Characterization and Metrology for Ulsi Technology: 1998 International Conference | 978-1-56396-753-5 (1-56396-753-7) | 1998 | A.C. Diebold · W.M. Bullis · T.J. Shaffner · R. McDonald · E.J. Walters |
D G · D S · David G. Seiler · G S