C. G. · C. Gabriel · C. T.
| title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
|---|---|---|---|
| 1996 1st International Symposium on Plasma Process-Induced Damage: 13-14 May 1996, Santa Clara, California, USA | 978-0-9651577-0-4 (0-9651577-0-9) | 1996 | Kin P. Cheung · Moritaka Nakamura |
| 1997 2nd International Symposium on Plasma Process-Induced Damage, Pip: 13-14 May 1997, Monterey, California, USA | 978-0-9651577-1-1 (0-9651577-1-7) | 1998 | Calif.) International Symposium on Plasma Process-Induced Damage (2nd : 1997 : Monterey · Kin P. Cheung · Moritaka Nakamura · American Vacuum Society · Oyo Butsuri Gakkai |
| 2002 7th International Symposium on Plasma- and Process-induced Damage June 5-7, 2002, Maui, Hawaii, USA | 978-0-9651577-8-0 (0-9651577-8-4) | 2002 | Terence Hook · Koji Eriguchi · editors · technical co-sponsors · AVS · IEEE/Electron Devices Society · Japanese Society of Applied Physics |