1997 2nd International Symposium on Plasma Process-Induced Damage, Pip: 13-14 May 1997, Monterey, California, USA

by: Calif.) International Symposium on Plasma Process-Induced Damage (2nd : 1997 : Monterey · Kin P. Cheung · Moritaka Nakamura · Calvin T. Gabriel · American Vacuum Society · Oyo Butsuri Gakkai

Hardcover

details (USA).

ISBN: 978-0-9651577-1-1

ISBN-10: 0-9651577-1-7

IEEE · 1998