| title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
|---|---|---|---|
| 1997 2nd International Symposium on Plasma Process-Induced Damage, Pip: 13-14 May 1997, Monterey, California, USA | 978-O-9651577-1-1 (O-9651577-1-7) | 1998 | Kin P. Cheung · Moritaka Nakamura · Calvin T. Gabriel · American Vacuum Society · Oyo Butsuri Gakkai |
C.S. · I.S.O. · International Symposium · S.O.
Calif.)) International Symposium on Plasma Process-Induced Damage (6th : 2001 : Monterey