CRC Press · Society of Photo Optical
| title | ISBN-13 | year of publica- tion | other author(s) |
|---|---|---|---|
| Microlithography: Science and Technology | 978-0-8247-9953-3 | 1998 | Kazuaki Suzuki · James R. Sheats |
| Microlithography: Science and Technology, Second Edition | 978-0-8247-9024-0 | 2007 | Kazuaki Suzuki |
| Microlithography: Science and Technology, Third Edition | 978-1-4398-7675-6 | 2019 | " |
| Optical Microlithography Xvii | 978-0-8194-5290-0 | 2004 | |
B.S. · B. Smith · B. W. · Bruce Smith · Bruce W. · W.S. · W. Smith