B. C · B. Courtois · Bernard C
title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
---|---|---|---|
Design, Test, and Microfabrication of Mems and Moems: 30 March-1 April 1999, Paris, France | 978-0-8194-3154-7 (0-8194-3154-0) | 1999 | Bernard Bourtois · Selden B. Crary · Wolfgang Ehrfeld · Hiroyuki Fujita · Jean-Michel Karam · Karen W. Markus |
Design, Test, Integration, and Packaging of Mems/ Moems 2001 | 978-0-8194-4109-6 (0-8194-4109-0) | 2001 | Jean-Michel Karam · Steven P. Levitan · Karen W. Markus · Andrew A. Tay |