| title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
|---|---|---|---|
| 1997 2nd International Symposium on Plasma Process-Induced Damage, Pip: 13-14 May 1997, Monterey, California, USA | 978-0-9651577-1-1 (0-9651577-1-7) | 1998 | Calif.) International Symposium on Plasma Process-Induced Damage (2nd : 1997 : Monterey · Kin P. Cheung · Moritaka Nakamura · Calvin T. Gabriel · Oyo Butsuri Gakkai |
| Experimental Vacuum Science and Technology | 978-0-8247-6068-7 (0-8247-6068-9) | 1973 | |