| title | ISBN-13 (ISBN-10) | year of publication |
|---|---|---|
| Micro-electro-mechanical systems --1999: Microelectromechanical systems, microfluidics, MEMS packaging, thermal devices and measurements, ... November 14-19, 1999, Nashville, Tennessee | 978-O-7918-1638-7 (O-7918-1638-9) | 1999 |
A.A. · A. E. · A-E-A · A. P. · A.P.A · E.A. · et a · P. A. · P.E.