Micro-electro-mechanical systems (MEMS)--1999: Microelectromechanical systems, microfluidics, MEMS packaging, thermal devices and measurements, ... November 14-19, 1999, Nashville, Tennessee

by Abraham P., et al. (eds.) Lee

Paperback

ISBN: 978-0-7918-1638-7

ISBN-10: 0-7918-1638-9

American Society of Mechanical Engineers · 1999