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Elsevier Science
> A. Tucciarone
A. Tucciarone
A. Tschermak
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Microcircuit Engineering 91: Proceedings of the International Conference on Microlithography September 17-19, 1991 Rome, Italy
978-O-444-895O9-7
(O-444-895O9-4)
1992
A. Paoletti
A. Tuchtfeldt