Microcircuit Engineering 91: Proceedings of the International Conference on Microlithography September 17-19, 1991 Rome, Italy
by:
A. Tucciarone ·
A. Paoletti
Hardcover
details (
USA
).
ISBN: 978-0-444-89509-7
ISBN-10: 0-444-89509-4
Elsevier Science Ltd
· 1992