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by Jie ChengPaperback details (United States). details (UK). details (Germany). ISBN: 978-981-13-5585-1 ISBN-10: 981-13-5585-1 Springer · 2019 |
| See also: | ||
| 2017 | Hardcover | Research on Chemical Mechanical Polishing Mechanism of Novel Diffusion Barrier Ru for Cu Interconnect (Springer Theses) |