Multi-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines (MEMS Reference Shelf)

Reference

by Jeffrey Lang

Paperback

ISBN: 978-1-4614-2459-8

ISBN-10: 1-4614-2459-3

Springer · 2012

See also:
2009HardcoverMulti-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines (MEMS Reference Shelf)