Multi-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines (MEMS Reference Shelf)

by Jeffrey Lang

Hardcover

details (USA).
(see also: eBook (Kindle))

details (UK).
(see also: eBook (Kindle))

details (Germany).
(see also: Kindle Ausgabe)

details (Canada).
(see also: eBook (Kindle))

ISBN: 978-0-387-77746-7

ISBN-10: 0-387-77746-6

Springer · 2009