Advances in CMP Polishing Technologies

Marinescu

by: Toshiro Doi · Ioan D. Marinescu · Syuhei Kurokawa

Hardcover

ISBN: 978-1-4377-7859-5

ISBN-10: 1-4377-7859-3

William Andrew · 2011

See also:
2018PaperbackAdvances in CMP Polishing Technologies