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by: Toshiro Doi · Ioan D. Marinescu · Syuhei KurokawaHardcover details (USA). details (UK). details (Germany). details (Canada). ISBN: 978-1-4377-7859-5 ISBN-10: 1-4377-7859-3 William Andrew · 2011 |
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2018 | Paperback | Advances in CMP Polishing Technologies |