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by: Toshiro Doi · Ioan D. Marinescu · Syuhei KurokawaPaperback details (USA). details (UK). details (Germany). details (Canada). ISBN: 978-0-12-810356-2 ISBN-10: 0-12-810356-6 William Andrew · 2018 |
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2011 | Hardcover | Advances in CMP Polishing Technologies |