Impurity Diffusion and Gettering in Silicon: Volume 36 (MRS Proceedings)

Gettering

by: Richard B. Fair · Charles W. Pearce · Jack Washburn

Hardcover

ISBN: 978-0-931837-01-2

ISBN-10: 0-931837-01-4

Cambridge University Press · 1985

See also:
2014PaperbackImpurity Diffusion and Gettering in Silicon: Volume 36 (MRS Proceedings)