Hardcover
ISBN: 978-0-7503-0695-9
ISBN-10: 0-7503-0695-5
Taylor & Francis · 2010
| See also: | ||
| 2001 | Paperback | Handbook of Thin Film Process Technology |
| 1997 | CD-ROM | Handbook of Thin Film Process Technology, CD-ROM |
| 1995 | Loose Leaf | Handbook of Thin Film Process Technology |