Handbook of Thin Film Process Technology

by: D Glocker · S Shah

Paperback

ISBN: 978-0-7503-0832-8

ISBN-10: 0-7503-0832-X

CRC Press · 2001

See also:
1997CD-ROMHandbook of Thin Film Process Technology, CD-ROM
1995Loose LeafHandbook of Thin Film Process Technology