Silicon Micromachining (Cambridge Studies in Semiconductor Physics and Microelectronic Engineering)

Micromachining

by: M. Elwenspoek · H. V. Jansen

Hardcover

ISBN: 978-0-521-59054-9

ISBN-10: 0-521-59054-X

Cambridge University Press · 1999

See also:
2008PaperbackSilicon Micromachining (Cambridge Studies in Semiconductor Physics and Microelectronic Engineering)