Silicon Nitride, Silicon Dioxide Thin Insulating Films, and Other Emerging Dielectrics VIII 2005

by: R. E. Sah · M. J. Deen · J. F. Zhang · J. Yota · Y. Kamakura

Hardcover

details (United States).

ISBN: 978-1-56677-459-8

ISBN-10: 1-56677-459-4

Electrochemical Society · 2005