R. E. Sah

R.S.

Electrochemical Society

titleISBN-13
(ISBN-10)
year of publica-
tion
other author(s)
Silicon Nitride, Silicon Dioxide Thin Insulating Films, and Other Emerging Dielectrics VIII 2005978-1-56677-459-8
(1-56677-459-4)
2005M. J. Deen · J. F. Zhang · J. Yota · Y. Kamakura

R. E. Schmidt