Design, Test, and Microfabrication of Mems and Moems: 30 March-1 April 1999, Paris, France (Proceedings of Spie--the International Society for Optical Engineering, V. 3680.)

by: Bernard Bourtois · Selden B. Crary · Wolfgang Ehrfeld · Hiroyuki Fujita · Jean-Michel Karam · Karen W. Markus · Bernard Courtois

SPIE-International Society for Optical Engine · 1999

Ppb.

details (United States).

details (Canada).

details (Germany).

details (France).

ISBN: 978-0-8194-3154-7

ISBN-10: 0-8194-3154-0