SPIE-International Society for Optical Engine · Springer, Berlin
| title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) | |
|---|---|---|---|---|
| Design, Test, and Microfabrication of Mems and Moems: 30 March-1 April 1999, Paris, France | 978-0-8194-3154-7 (0-8194-3154-0) | 1999 | Bernard Bourtois · Selden B. Crary · Wolfgang Ehrfeld · Jean-Michel Karam · Karen W. Markus · Bernard Courtois | |
| Micromachines as Tools for Nanotechnology | 978-3-540-00856-9 (3-540-00856-X) | 2003 | ||