| Titel | ISBN-13 (ISBN-10) | Erschei- nungsjahr | andere Autoren |
|---|---|---|---|
| Ultraclean Surface Processing of Silicon Wafers: Secrects of VLSI Manufacturing | 978-3-642-08272-6 (3-642-08272-6) | 2010 | Takeshi Hattori · T. Hattori · J.P. Webb |
| Ultraclean Surface Processing of Silicon Wafers: Secrets of VLSI Manufacturing | 978-3-540-61672-6 (3-540-61672-1) | 1998 | Takeshi Hattori · T. Hattori · J.P. Webb |