title | media type | ISBN-13 | year of publica- tion | other author(s) |
---|---|---|---|---|
Plasma Electronics: Applications in Microelectronic Device Fabrication, 2nd Edition | Paperback | 978-0-367-36484-7 | 2019 | Toshiaki Makabe |
Plasma Electronics: Applications in Microelectronic Device Fabrication | " | 978-1-138-03415-0 | 2016 | " |
Plasma Electronics: Applications in Microelectronic Device Fabrication | Hardcover | 978-1-4822-2205-0 | 2014 | " |
Plasma Electronics: Applications in Microelectronic Device Fabrication | " | 978-0-7503-0976-9 | 2006 | " |