Society of Photo Optical · Uhrl
| title | ISBN-13 | year of publica- tion | other author(s) |
|---|---|---|---|
| Emerging Lithographic Technologies II: 23-25 February 1998 Santa Clara, California | 978-0-8194-2776-2 | 1998 | Society of Photo-Optical Instrumentation Engineers |
| Emerging Lithographic Technologies III: 15-17 March, 1999, Santa Clara, California | 978-0-8194-3150-9 | 1999 | " |
| Materials and Device Characterization in Micromachining | 978-0-8194-2971-1 | 1998 | Craig R. Friedrich |
| X-ray Lithography - on the sweet spot | 978-0-9789839-0-1 | 2006 | Antony Bourdillon |