| title | media type | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
|---|---|---|---|---|
| Sub-Half-Micron Lithography for ULSIs | Paperback | 978-0-521-02234-7 (0-521-02234-7) | 2005 | Katsumi Suzuki · Shinji Matsui |
| Sub-Half-Micron Lithography for ULSIs | Hardcover | 978-0-521-57080-0 (0-521-57080-8) | 2000 | Katsumi Suzuki · Shinji Matsui |