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Y. V. Panfilov
V.P.
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Yu V. Panfilov
title
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(ISBN-10)
year of publica-
tion
other author(s)
Mechanics and Physics of Precise Vacuum Mechanisms
978-9O-481-2519-7
(9O-481-2519-7)
2009
E. A. Deulin · V. P. Mikhailov · R. A. Nevshupa
Y.V. Pleskov