| title | media type | ISBN-13 (ISBN-10) | year of publication |
|---|---|---|---|
| Microelectronic Processing: An Introduction to the Manufacture of Integrated Circuits | Paperback | 978-0-07-100282-0 (0-07-100282-0) | 1988 |
| Microelectronic Processing: An Introduction to the Manufacture of Integrated Circuits | Hardcover | 978-0-07-054280-8 (0-07-054280-5) | 1987 |
S R · W R. · W.S. · W. Scot Ruska · Walter S.