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McGraw-Hill
> W. Scot Ruska
W. Scot Ruska
title
ISBN-13
(ISBN-10)
year of publication
Microelectronic processing: An introduction to the manufacture of integrated circuits
978-O-O7-O54281-5
(O-O7-O54281-3)
1987
S R
·
W R.
·
W.S.
·
Walter Scot Ruska
W. Scott