W Hauffe

W H

titlemedia type ISBN-13
(ISBN-10)
year of publica-
tion
other author(s)
Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical ApplicationsHardcover 978-0-387-53428-2
(0-387-53428-8)
1991R Behrisch · W O Hofer
Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical ApplicationsGebunden
978-3-540-53428-0
(3-540-53428-8)
1991Rainer Behrisch · Klaus Wittmaack · R. Behrisch · W.O. Hofer · N. Laegreid · E.D. McClanahan · B.U.R. Sundqvist

W. Haug