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> V. P. Savinov
V. P. Savinov
title
ISBN-13
(ISBN-10)
year of publication
Physics of Radiofrequency Capacitive Discharge
978-1-138-6OO8O-5
(1-138-6OO8O-6)
2018
P S
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V.P.
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V. S.
V. P. Savinykh