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Navuka i tėkhnika
> V. P Parkhutik
V. P Parkhutik
P.P.
·
V.P.
title
ISBN-13
(ISBN-10)
year of publication
Plazmennoe anodirovanie: Fizika, tekhnika, primenenie v mikroėlektronike
978-5-343-OO522-6
(5-343-OO522-5)
1990
V. P. Pease