V. P Parkhutik

P.P. · V.P.

titleISBN-13
(ISBN-10)
year of publication
Plazmennoe anodirovanie: Fizika, tekhnika, primenenie v mikroėlektronike978-5-343-OO522-6
(5-343-OO522-5)
1990

V. P. Pease