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Society of Photo Optical
> Uwe F. Behringer
Uwe F. Behringer
Uwe Behringer
·
Uwe F. W. Behringer
title
ISBN-13
(ISBN-10)
year of publication
23rd European Mask and Lithography Conference
978-0-8194-6655-6
(0-8194-6655-7)
2007
24th European Mask and Lithography Conference
978-0-8194-6956-4
(0-8194-6956-4)
2008
Uwe F. Gühl