| title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
|---|---|---|---|
| 2002 7th International Symposium on Plasma- and Process-induced Damage June 5-7, 2002, Maui, Hawaii, USA | 978-O-9651577-8-O (O-9651577-8-4) | 2002 | Terence Hook · Koji Eriguchi · Calvin T. Gabriel · editors · AVS · IEEE/Electron Devices Society · Japanese Society of Applied Physics |